Laser Heat-Mode Lithography Principle and Methods /

• Main Author: Wei, Jingsong (Author, http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Singapore : Springer Singapore : Imprint: Springer, 2019.
• Edition: 1st ed. 2019.
• Series: Springer Series in Materials Science, 291
• Subjects: Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Lasers.; Photonics.; Microwaves.; Optical engineering.; Optical materials.; Electronic materials.; Surface and Interface Science, Thin Films.; Optics, Lasers, Photonics, Optical Devices.; Microwaves, RF and Optical Engineering.; Optical and Electronic Materials.

This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applicati...

Table of Contents:

• Current status of lithography
• Principles of laser heat-mode lithography and thermal diffusion
• Laser heat-mode maskless lithography system
• Manipulation of thermal diffusion channels
• Laser heat-mode nanolithography on phase-change thin films
• Direct laser heat-mode nanopatterning on metallo-organic compound thin films
• Laser heat-mode patterning of transparent thin films
• Laser heat-mode grayscale image lithography
• Patterns transfer processes and applications.