Laser Heat-Mode Lithography Principle and Methods /
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applicati...
Κύριος συγγραφέας: | |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Singapore :
Springer Singapore : Imprint: Springer,
2019.
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Έκδοση: | 1st ed. 2019. |
Σειρά: | Springer Series in Materials Science,
291 |
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Current status of lithography
- Principles of laser heat-mode lithography and thermal diffusion
- Laser heat-mode maskless lithography system
- Manipulation of thermal diffusion channels
- Laser heat-mode nanolithography on phase-change thin films
- Direct laser heat-mode nanopatterning on metallo-organic compound thin films
- Laser heat-mode patterning of transparent thin films
- Laser heat-mode grayscale image lithography
- Patterns transfer processes and applications.