9783731511212.pdf
Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of...
| Language: | ger |
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| Published: |
KIT Scientific Publishing
2022
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| Online Access: | https://doi.org/10.5445/KSP/1000136062 |
