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oapen-20.500.12657-536942022-04-05T03:01:57Z Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis Kopf, Marlene MEMS-Sensor Drehratensensor Inertialsensor Dämpfung Q-Faktor MEMS sensor gyroscope inertial sensor damping atmosphere Q factor bic Book Industry Communication::T Technology, engineering, agriculture::TG Mechanical engineering & materials Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack. 2022-04-04T14:53:17Z 2022-04-04T14:53:17Z 2022 book ONIX_20220404_9783731511212_6 1869-5183 9783731511212 https://library.oapen.org/handle/20.500.12657/53694 ger Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie application/pdf n/a 9783731511212.pdf https://doi.org/10.5445/KSP/1000136062 KIT Scientific Publishing KIT Scientific Publishing 10.5445/KSP/1000136062 Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack. 10.5445/KSP/1000136062 44e29711-8d53-496b-85cc-3d10c9469be9 9783731511212 KIT Scientific Publishing 42 220 Karlsruhe open access
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