Principles of MEMS /

• Main Author: Lee, Ki Bang
• Format: eBook
• Language: English
• Published: Hoboken, N.J. : WILEY, [2010]
• Subjects: Microelectromechanical systems.; TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.; TECHNOLOGY & ENGINEERING > Electronics > Digital.; Electronic books.

"The building blocks of MEMS design through closed-form solutions. Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles...