Principles of MEMS /
"The building blocks of MEMS design through closed-form solutions. Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles...
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| Format: | eBook |
| Language: | English |
| Published: |
Hoboken, N.J. :
WILEY,
[2010]
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| Online Access: | Full Text via HEAL-Link |
