Digital holography for MEMS and microsystem metrology /

• Άλλοι συγγραφείς: Asundi, Anand
• Μορφή: Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Chichester : Wiley, [2011]
• Σειρά: Wiley microsystem and nanotechnology series.
• Θέματα: Microelectromechanical systems > Measurement.; Microelectronics > Measurement.; Holographic testing.; Image processing > Digital techniques.; TECHNOLOGY & ENGINEERING > Electronics > Digital.; TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.; Electronic books.

Approaching the topic of digital holography from the practical perspective of industrial inspection, "Digital Holography for MEMS and Microsystem Metrology" describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, desi...