Digital holography for MEMS and microsystem metrology /
Approaching the topic of digital holography from the practical perspective of industrial inspection, "Digital Holography for MEMS and Microsystem Metrology" describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, desi...
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| Format: | eBook |
| Language: | English |
| Published: |
Chichester :
Wiley,
[2011]
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| Series: | Wiley microsystem and nanotechnology series.
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| Subjects: | |
| Online Access: | Full Text via HEAL-Link |
