Digital holography for MEMS and microsystem metrology /

• Other Authors: Asundi, Anand
• Format: eBook
• Language: English
• Published: Chichester : Wiley, [2011]
• Series: Wiley microsystem and nanotechnology series.
• Subjects: Microelectromechanical systems > Measurement.; Microelectronics > Measurement.; Holographic testing.; Image processing > Digital techniques.; TECHNOLOGY & ENGINEERING > Electronics > Digital.; TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.; Electronic books.

Approaching the topic of digital holography from the practical perspective of industrial inspection, "Digital Holography for MEMS and Microsystem Metrology" describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, desi...