System-level modeling of MEMS /

• Other Authors: Bechtold, T. (Tamara), Schrag, Gabriele, Feng, Lihong
• Format: eBook
• Language: English
• Published: Weinheim : Wiley-VCH, [2013]
• Series: Advanced micro et nanosystems ; 10.
• Subjects: Microelectromechanical systems > Simulation methods.; Electronic books.
• Physical Description: 1 online resource.
• Bibliography: Includes bibliographical references and index.
• ISBN: 9783527647132; 3527647139; 9783527647125; 3527647120
• DOI: 10.1002/9783527647132