Nano-lithography /

• Άλλοι συγγραφείς: Landis, Stefan
• Μορφή: Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: London : Wiley, 2013.
• Σειρά: ISTE.
• Θέματα: Nanolithography.; TECHNOLOGY & ENGINEERING > Electronics > Circuits > General.; Electronic books.

Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and el...