Landis, S. (2013). Nano-lithography. Wiley. https://doi.org/10.1002/9781118622582
Chicago Style (17th ed.) CitationLandis, Stefan. Nano-lithography. London: Wiley, 2013. https://doi.org/10.1002/9781118622582.
MLA (8th ed.) CitationLandis, Stefan. Nano-lithography. Wiley, 2013. https://doi.org/10.1002/9781118622582.
Warning: These citations may not always be 100% accurate.