Nano-lithography /
Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and el...
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| Format: | eBook |
| Language: | English |
| Published: |
London :
Wiley,
2013.
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| Series: | ISTE.
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| Subjects: | |
| Online Access: | Full Text via HEAL-Link |
| Summary: | Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams - in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics. |
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| Item Description: | 3.4.2. Comparison with competing advanced lithography techniques. |
| Physical Description: | 1 online resource (353 pages). |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781118622582 1118622588 9781118621622 111862162X |
| DOI: | 10.1002/9781118622582 |
