Nano-lithography /
Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and el...
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| Format: | eBook |
| Language: | English |
| Published: |
London :
Wiley,
2013.
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| Series: | ISTE.
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| Subjects: | |
| Online Access: | Full Text via HEAL-Link |
