Nano-lithography /

• Other Authors: Landis, Stefan
• Format: eBook
• Language: English
• Published: London : Wiley, 2013.
• Series: ISTE.
• Subjects: Nanolithography.; TECHNOLOGY & ENGINEERING > Electronics > Circuits > General.; Electronic books.

Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and el...