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APA (7th ed.) Citation

Kääriäinen, T., Cameron, D., Kääriäinen, M., & Sherman, A. (2013). Atomic layer deposition: Principles, characteristics, and nanotechnology applications (2nd edition.). Scrivener Publishing, LLC ; Wiley. https://doi.org/10.1002/9781118747407

Chicago Style (17th ed.) Citation

Kääriäinen, Tommi, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. 2nd edition. Salem, Massachusetts : Hoboken, New Jersey: Scrivener Publishing, LLC ; Wiley, 2013. https://doi.org/10.1002/9781118747407.

MLA (8th ed.) Citation

Kääriäinen, Tommi, et al. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. 2nd edition. Scrivener Publishing, LLC ; Wiley, 2013. https://doi.org/10.1002/9781118747407.

Warning: These citations may not always be 100% accurate.