Handbook of 3D Integration : 3D process technology /

• Other Authors: Garrou, Philip E. (Editor), Koyanagi, Mitsumasa (Editor), Ramm, Peter (Editor)
• Format: eBook
• Language: English
• Published: Weinheim, Germany : Wiley-VCH, 2014.
• Subjects: Three-dimensional integrated circuits > Design and construction > Handbooks, manuals, etc.; Three-dimensional imaging > Handbooks, manuals, etc.; Electronic books.
• Physical Description: 1 online resource
• Bibliography: Includes bibliographical references and index.
• ISBN: 9783527670109; 3527670106
• DOI: 10.1002/9783527670109