Resonant MEMS : fundamentals, implementation and application /

• Other Authors: Brand, Oliver, 1964- (Editor), Dufour, Isabelle (Electrical engineer) (Editor), Heinrich, Stephen M. (Editor), Josse, Fabien (Editor)
• Format: eBook
• Language: English
• Published: Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]
• Series: Advanced micro & nanosystems.
• Subjects: Microelectromechanical systems > Design and construction.; Microfabrication.; Resonance.; TECHNOLOGY & ENGINEERING / Electronics / Digital; TECHNOLOGY & ENGINEERING / Electronics / General; TECHNOLOGY & ENGINEERING / Electronics / Microelectronics; Electronic books.
• Physical Description: 1 online resource : illustrations.
• Bibliography: Includes bibliographical references and index.
• ISBN: 9783527676361; 3527676368; 9783527676354; 352767635X; 9783527676347; 3527676341; 9783527676330; 3527676333; 3527335455; 9783527335459
• DOI: 10.1002/9783527676330