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| LEADER |
03004nam a2200721 4500 |
| 001 |
ocn908335689 |
| 003 |
OCoLC |
| 005 |
20170124071528.6 |
| 006 |
m o d |
| 007 |
cr cnu|||unuuu |
| 008 |
150504s2015 gw a ob 001 0 eng d |
| 040 |
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|a N$T
|b eng
|e rda
|e pn
|c N$T
|d IDEBK
|d CDX
|d N$T
|d YDXCP
|d RECBK
|d E7B
|d DG1
|d OCLCF
|d COO
|d OHI
|d DEBBG
|d K6U
|d GrThAP
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| 019 |
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|a 961627051
|a 962626856
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| 020 |
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|a 9783527676361
|q electronic bk.
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| 020 |
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|a 3527676368
|q electronic bk.
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| 020 |
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|a 9783527676354
|q electronic bk.
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| 020 |
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|a 352767635X
|q electronic bk.
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| 020 |
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|a 9783527676347
|q electronic bk.
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| 020 |
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|a 3527676341
|q electronic bk.
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| 020 |
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|a 9783527676330
|q electronic bk.
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| 020 |
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|a 3527676333
|q electronic bk.
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| 020 |
|
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|z 9783527335459
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| 020 |
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|a 3527335455
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| 020 |
|
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|a 9783527335459
|
| 029 |
1 |
|
|a AU@
|b 000055036170
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| 029 |
1 |
|
|a GBVCP
|b 826453139
|
| 029 |
1 |
|
|a AU@
|b 000058373576
|
| 029 |
1 |
|
|a DEBBG
|b BV043397763
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| 035 |
|
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|a (OCoLC)908335689
|z (OCoLC)961627051
|z (OCoLC)962626856
|
| 050 |
|
4 |
|a TK7875
|
| 072 |
|
7 |
|a TEC
|x 008060
|2 bisacsh
|
| 072 |
|
7 |
|a TEC
|x 008000
|2 bisacsh
|
| 072 |
|
7 |
|a TEC
|x 008070
|2 bisacsh
|
| 082 |
0 |
4 |
|a 621.381
|2 23
|
| 049 |
|
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|a MAIN
|
| 245 |
0 |
0 |
|a Resonant MEMS :
|b fundamentals, implementation and application /
|c edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse.
|
| 264 |
|
1 |
|a Wiesbaden :
|b Wiley-VCH Verlag & Co. KGaA,
|c [2015]
|
| 300 |
|
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|a 1 online resource :
|b illustrations.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
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|a computer
|b c
|2 rdamedia
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| 338 |
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|a online resource
|b cr
|2 rdacarrier
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| 490 |
1 |
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|a Advanced micro and nanosystems
|
| 588 |
0 |
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|a Online resource; title from PDF title page (Ebsco, viewed May 11, 2015).
|
| 504 |
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Design and construction.
|
| 650 |
|
0 |
|a Microfabrication.
|
| 650 |
|
0 |
|a Resonance.
|
| 650 |
|
7 |
|a TECHNOLOGY & ENGINEERING / Electronics / Digital
|2 bisacsh
|
| 650 |
|
7 |
|a TECHNOLOGY & ENGINEERING / Electronics / General
|2 bisacsh
|
| 650 |
|
7 |
|a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
|2 bisacsh
|
| 650 |
|
7 |
|a Microelectromechanical systems
|x Design and construction.
|2 fast
|0 (OCoLC)fst01019747
|
| 650 |
|
7 |
|a Microfabrication.
|2 fast
|0 (OCoLC)fst01019807
|
| 650 |
|
7 |
|a Resonance.
|2 fast
|0 (OCoLC)fst01095610
|
| 655 |
|
4 |
|a Electronic books.
|
| 655 |
|
0 |
|a Electronic books.
|
| 700 |
1 |
|
|a Brand, Oliver,
|d 1964-
|e editor.
|
| 700 |
1 |
|
|a Dufour, Isabelle
|c (Electrical engineer),
|e editor.
|
| 700 |
1 |
|
|a Heinrich, Stephen M.,
|e editor.
|
| 700 |
1 |
|
|a Josse, Fabien,
|e editor.
|
| 776 |
0 |
8 |
|i Print version:
|t Resonant MEMS : fundamentals, implementation and application.
|d Weinheim, Baden-Württemberg, Germany : Wiley-VCH, c2015
|h xxv, 483 pages
|k Advanced micro & nanosystems.
|z 9783527335459
|
| 830 |
|
0 |
|a Advanced micro & nanosystems.
|
| 856 |
4 |
0 |
|u https://doi.org/10.1002/9783527676330
|z Full Text via HEAL-Link
|
| 994 |
|
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|a 92
|b DG1
|
