Resonant MEMS : fundamentals, implementation and application /

• Other Authors: Brand, Oliver, 1964- (Editor), Dufour, Isabelle (Electrical engineer) (Editor), Heinrich, Stephen M. (Editor), Josse, Fabien (Editor)
• Format: eBook
• Language: English
• Published: Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]
• Series: Advanced micro & nanosystems.
• Subjects: Microelectromechanical systems > Design and construction.; Microfabrication.; Resonance.; TECHNOLOGY & ENGINEERING / Electronics / Digital; TECHNOLOGY & ENGINEERING / Electronics / General; TECHNOLOGY & ENGINEERING / Electronics / Microelectronics; Electronic books.