Materials and failures in MEMS and NEMS /

• Other Authors: Tiwari, Atul (Editor), Raj, Baldev, 1947- (Editor)
• Format: eBook
• Language: English
• Published: Hoboken, New Jersey : Salem, Massachusetts : John Wiley & Sons ; Scrivener Publishing, 2015.
• Series: Materials degradation and failures series
• Subjects: Microelectromechanical systems > Design and construction.; Nanoelectromechanical systems > Design and construction.; TECHNOLOGY & ENGINEERING / Mechanical; Electronic books.