Materials and failures in MEMS and NEMS /

• Other Authors: Tiwari, Atul (Editor), Raj, Baldev, 1947- (Editor)
• Format: eBook
• Language: English
• Published: Hoboken, New Jersey : Salem, Massachusetts : John Wiley & Sons ; Scrivener Publishing, 2015.
• Series: Materials degradation and failures series
• Subjects: Microelectromechanical systems > Design and construction.; Nanoelectromechanical systems > Design and construction.; TECHNOLOGY & ENGINEERING / Mechanical; Electronic books.
• Physical Description: 1 online resource.
• Bibliography: Includes bibliographical references and index.
• ISBN: 9781119083870 (pdf); 1119083877 (pdf); 9781119083863 (epub); 1119083869 (epub); 9781119083887; 1119083885; 1119083605; 9781119083603
• DOI: 10.1002/9781119083887
• Access: Owing to Legal Deposit regulations this resource may only be accessed from within National Library of Scotland. For more information contact [e-mail].