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05314nam a2200673 4500 |
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ocn913890495 |
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OCoLC |
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20170124072018.9 |
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m o d |
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cr ||||||||||| |
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150714s2015 nju ob 001 0 eng |
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|a 2015027730
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|a DLC
|b eng
|e rda
|c DLC
|d YDX
|d N$T
|d YDXCP
|d IDEBK
|d DG1
|d CDX
|d RECBK
|d COO
|d EBLCP
|d NLE
|d DEBBG
|d KSU
|d CCO
|d GrThAP
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|a GBB623210
|2 bnb
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|a 927509309
|a 932062836
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|a 9781119083870 (pdf)
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|a 1119083877 (pdf)
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|a 9781119083863 (epub)
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|a 1119083869 (epub)
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|z 9781119083603 (cloth : alk. paper)
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|a 9781119083887
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|a 1119083885
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|a 1119083605
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|a 9781119083603
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1 |
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|a AU@
|b 000055079397
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1 |
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|a GBVCP
|b 838921493
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1 |
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|a DEBBG
|b BV043397944
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|a (OCoLC)913890495
|z (OCoLC)927509309
|z (OCoLC)932062836
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| 037 |
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|a 9781119083863
|b Wiley
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|a pcc
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| 050 |
0 |
0 |
|a TK7875
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| 072 |
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7 |
|a TEC
|x 009070
|2 bisacsh
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0 |
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|a 621.381
|2 23
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| 049 |
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|a MAIN
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0 |
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|a Materials and failures in MEMS and NEMS /
|c edited by Atul Tiwari and Baldev Raj.
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| 264 |
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1 |
|a Hoboken, New Jersey :
|b John Wiley & Sons ;
|a Salem, Massachusetts :
|b Scrivener Publishing,
|c 2015.
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| 300 |
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|a 1 online resource.
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| 336 |
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|a text
|2 rdacontent
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| 337 |
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|a computer
|2 rdamedia
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| 338 |
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|a online resource
|2 rdacarrier
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| 490 |
0 |
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|a Materials degradation and failures series
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| 504 |
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|a Includes bibliographical references and index.
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| 588 |
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|a Description based on print version record and CIP data provided by publisher.
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0 |
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|a ""Half Title page -- Title page -- Copyright page -- Preface -- Chapter 1: Carbon as a MEMS Material -- 1.1 Introduction -- 1.2 Structure and Properties of Glassy Carbon -- 1.3 Fabrication of C-MEMS Structures -- 1.4 Integration of C-MEMS Structures with Other Materials -- 1.5 Conclusion -- References -- Chapter 2: Intelligent Model-Based Fault Diagnosis of MEMS -- 2.1 Introduction -- 2.2 Model-Based Fault Diagnosis -- 2.3 Self-Tuning Estimation -- References -- Chapter 3: MEMS Heat Exchangers -- 3.1 Introduction""
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|a ""3.2 Fundamentals of Thermodynamics, Fluid Mechanics, and Heat Transfer -- 3.3 MEMS Heat Sinks -- 3.4 MEMS Heat Pipes -- 3.5 Two-Fluid MEMS Heat Exchanger -- 3.6 Need for Microscale Internal Flow Passages -- Nomenclature -- Greek Alphabets -- Subscripts -- References -- Chapter 4: Application of Porous Silicon in MEMS and Sensors Technology -- 4.1 Introduction -- 4.2 Porous Silicon in Biosensors -- 4.3 Porous Silicon for Pressure Sensors -- 4.4 Conclusion -- References -- Chapter 5: MEMS/NEMS Switches with Silicon to Silicon (Si-to-Si) Contact Interface""
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|a ""5.1 Introduction -- 5.2 Bi-Stable CMOS Front End Silicon Nanofin (SiNF) Switch for Non-volatile Memory Based On Van Der Waals Force -- 5.3 Vertically Actuated U-Shape Nanowire NEMS Switch -- 5.4 A Vacuum Encapsulated Si-to-Si MEMS Switch for Rugged Electronics -- 5.5 Summary -- References -- Chapter 6: On the Design, Fabrication, and Characterization of cMUT Devices -- 6.1 Introduction -- 6.2 cMUT Design and Finite Element Modeling Simulation -- 6.3 cMUT Fabrication and Characterization -- 6.4 Summary and Conclusions -- Acknowledgments -- References""
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8 |
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|a ""Chapter 7: Inverse Problems in the MEMS/NEMS Applications -- 7.1 Introduction -- 7.2 Inverse Problems in the Micro/Nanomechanical Resonators -- 7.3 Inverse Problems in the MEMS Stiction Test -- Acknowledgment -- References -- Chapter 8: Ohmic RF-MEMS Control -- 8.1 Introduction -- 8.2 Charge Drive Control (Resistive Damping) -- 8.3 Hybrid Drive Control -- 8.4 Control Under High-Pressure Gas Damping -- 8.5 Comparison between Different Control Modes -- References -- Chapter 9: Dynamics of MEMS Devices -- 9.1 Introduction -- 9.2 Modeling and Simulation""
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8 |
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|a ""9.3 Fabrication Methods -- 9.4 Characterization -- 9.5 Device Failures -- Acknowledgments -- References -- Chapter 10: Buckling Behaviors and Interfacial Toughness of a Micron-Scale Composite Structure with a Metal Wire on a Flexible Substrate -- 10.1 Introduction -- 10.2 Buckling Behaviors of Constantan Wire under Electrical Loading -- 10.3 Interfacial Toughness between Constantan Wire and Polymer Substrate -- 10.4 Buckling Behaviors of Polymer Substrate Restricted by Constantan Wire -- 10.5 Conclusions -- Acknowledgments -- References""
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|a Owing to Legal Deposit regulations this resource may only be accessed from within National Library of Scotland. For more information contact enquiries@nls.uk.
|5 StEdNL
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| 650 |
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0 |
|a Microelectromechanical systems
|x Design and construction.
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| 650 |
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0 |
|a Nanoelectromechanical systems
|x Design and construction.
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| 650 |
|
7 |
|a TECHNOLOGY & ENGINEERING / Mechanical
|2 bisacsh
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| 655 |
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4 |
|a Electronic books.
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| 655 |
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0 |
|a Electronic books.
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| 700 |
1 |
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|a Tiwari, Atul,
|e editor.
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| 700 |
1 |
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|a Raj, Baldev,
|d 1947-
|e editor.
|
| 776 |
0 |
8 |
|i Print version:
|t Materials and failures in MEMS and NEMS
|d Hoboken, New Jersey : John Wiley & Sons ; Salem, Massachusetts : Scrivener Publishing, 2015
|z 9781119083603
|w (DLC) 2015025146
|
| 856 |
4 |
0 |
|u https://doi.org/10.1002/9781119083887
|z Full Text via HEAL-Link
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| 994 |
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|a 92
|b DG1
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