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Rare-Earth Implanted MOS Devices for Silicon Photonics
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Rare-Earth Implanted MOS Devices for Silicon Photonics Microstructural, Electrical and Optoelectronic Properties /
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Rebohle, Lars
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Skorupa, Wolfgang
Published 2010
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Rare-Earth Implanted MOS Devices for Silicon Photonics Microstructural, Electrical and Optoelectronic Properties
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