Analysis and design principles of MEMS devices

• Main Author: Bao, Min-Hang
• Corporate Author: ScienceDirect (Online service)
• Format: Electronic Book
• Language: English
• Published: Amsterdam Boston London Elsevier 2005
• Subjects: Μικροηλεκτρονική

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS dev...