Micro and Nano Fabrication Tools and Processes /

• Main Authors: Gatzen, Hans H. (Author), Saile, Volker (Author), Leuthold, Jürg (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
• Subjects: Engineering.; Nanotechnology.; Manufacturing industries.; Machines.; Tools.; Industrial engineering.; Nanotechnology and Microengineering.; Manufacturing, Machines, Tools.; Operating Procedures, Materials Treatment.
• Physical Description: XXVI, 519 p. 357 illus., 54 illus. in color. online resource.
• ISBN: 9783662443958

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.