Atomic layer deposition : principles, characteristics, and nanotechnology applications /

Atomic layer deposition : principles, characteristics, and nanotechnology applications /

Bibliographic Details
Main Author: Kääriäinen, Tommi
Other Authors: Cameron, David, 1949-, Kääriäinen, Marja-Leena, Sherman, Arthur, 1931-
Format: eBook
Language:English
Published: Salem, Massachusetts : Hoboken, New Jersey : Scrivener Publishing, LLC ; Wiley, [2013]
Edition:2nd edition.
Subjects:
Chemical vapor deposition.
Epitaxy.
Microelectronics.
Nanotechnology.
SCIENCE > Nanoscience.
TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS.
Nanotechnologie
Atomlagenabscheidung
Mikroelektromekaniska system.
Electronic books.
Online Access:Full Text via HEAL-Link
Description
Physical Description:1 online resource.
Bibliography:Includes bibliographical references and index.
ISBN:9781118747384
1118747380
9781118747421
1118747429
9781118747346
1118747348
9781118747407
1118747402
9781299619128
1299619126
DOI:10.1002/9781118747407

Similar Items