Atomic layer deposition : principles, characteristics, and nanotechnology applications /

• Main Author: Kääriäinen, Tommi
• Other Authors: Cameron, David, 1949-, Kääriäinen, Marja-Leena, Sherman, Arthur, 1931-
• Format: eBook
• Language: English
• Published: Salem, Massachusetts : Hoboken, New Jersey : Scrivener Publishing, LLC ; Wiley, [2013]
• Edition: 2nd edition.
• Subjects: Chemical vapor deposition.; Epitaxy.; Microelectronics.; Nanotechnology.; SCIENCE > Nanoscience.; TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS.; Nanotechnologie; Atomlagenabscheidung; Mikroelektromekaniska system.; Electronic books.